In-chip direct laser writing of a centimeter-scale acoustic micromixer
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2015
ISSN: 1932-5150
DOI: 10.1117/1.jmm.14.2.023503